octachlorotrisilane

• CAT Number: M058837
• CAS Number: 13596-23-1
• Molecular Formula: Cl8Si3
• Molecular Weight: 367.86
• Purity: ≥95%
• Storage: -80°C
• IUPAC Name: trichloro-[dichloro(trichlorosilyl)silyl]silane
• InChI: InChI=1S/Cl8Si3/c1-9(2,3)11(7,8)10(4,5)6
• InChIKey: PZKOFHKJGUNVTM-UHFFFAOYSA-N
• SMILES: [Si]([Si](Cl)(Cl)Cl)([Si](Cl)(Cl)Cl)(Cl)Cl

Octachlorotrisilane (Cat No.:M058837) is an inorganic silicon compound consisting of three silicon atoms bonded together and fully substituted with eight chlorine atoms. It is a volatile, reactive liquid primarily used as a precursor in the deposition of silicon-containing films via chemical vapor deposition (CVD) and plasma-enhanced CVD processes. Its high silicon content and controlled reactivity make it valuable in microelectronics and semiconductor fabrication. Octachlorotrisilane can also serve as a building block for advanced silane chemistry and ceramic materials. Due to its moisture sensitivity and potential to release corrosive byproducts, it must be handled under inert conditions.