Hexamethyldisiloxane

• CAT Number: R051593
• CAS Number: 107-46-0
• Molecular Formula: C6H18OSi2
• Molecular Weight: 162.38
• Purity: ≥95%
• Synonyms: H2942151,1,1,3,3,3-Hexamethyldisiloxane; Belsil DM 0.65; Bis(trimethylsilyl) Ether; Bis(trimethylsilyl) oxide; DC 0.65cs200; Dow Corning 200/0.65; Dow Corning OS 10; Ethoxytrimethylsilane-hexamethyldisiloxane Copolymer; Glipoxan; HMDSO; HX 18; KF 96L
• Storage: Desiccate at -20C
• IUPAC Name: trimethyl(trimethylsilyloxy)silane
• InChI: InChI=1S/C6H18OSi2/c1-8(2,3)7-9(4,5)6/h1-6H3
• InChIKey: UQEAIHBTYFGYIE-UHFFFAOYSA-N
• SMILES: C[Si](C)(C)O[Si](C)(C)C

Hexamethyldisiloxane (CAT: R051593) is a volatile, low-viscosity organosilicon compound composed of two trimethylsilyl groups linked by an oxygen atom. Widely used as a reagent, solvent, and surface modifier, HMDSO plays a key role in organic synthesis, particularly in silylation reactions to protect hydroxyl groups. In materials science, it serves as a precursor in plasma-enhanced chemical vapor deposition (PECVD) for forming hydrophobic or dielectric thin films. Its high thermal stability and low surface energy make it valuable in coatings, electronics, and microfabrication.