HEXACHLORODISILANE

• CAT Number: M059917
• CAS Number: 13465-77-5
• Molecular Formula: Cl6Si2
• Molecular Weight: 268.87
• Purity: ≥95%
• Storage: -20°C
• IUPAC Name: trichloro(trichlorosilyl)silane
• InChI: InChI=1S/Cl6Si2/c1-7(2,3)8(4,5)6
• InChIKey: LXEXBJXDGVGRAR-UHFFFAOYSA-N
• SMILES: [Si]([Si](Cl)(Cl)Cl)(Cl)(Cl)Cl

Hexachlorodisilane (Cat No.:M059917) is a colorless to pale yellow volatile liquid composed of two silicon atoms bonded together and each substituted with three chlorine atoms. It is a highly reactive silicon compound used primarily as a precursor in the deposition of silicon-containing films via chemical vapor deposition (CVD) in microelectronics and semiconductor manufacturing. Hexachlorodisilane is valued for its high silicon content and clean decomposition, making it suitable for producing thin films, silicon carbide, and other advanced materials. It is moisture-sensitive and corrosive, releasing hydrochloric acid upon hydrolysis, thus requiring handling under dry, inert conditions.